Key Specifications
The CX-200PLUS product is developed for simple use by users through compact design and the upgraded software Nano-station 4.0.
- Compact and Strong Performance
- 3nm Resolution
- Standard SE, BSE Detector
- Standard Chamber Scope
- Standard Panorama
- Signal Mixing
- Fully Compatible EDS
- 10 Ports for Third party
Software
Nanostation 4.0(COXEM SEM Dedicated Software)
NS 4.0 provides most intuitive and convenient UI(user interface) for operations of COXEM SEM.
NS 4.0 was designed not only for experienced SEM users but also for the first-time users.
The software Nano-station of COXEM can be used easily with a mouse and a keyboard, and it can reduce the inconvenience of users’ direct operations through the Auto Function feature. Moreover, the panorama shot function, by eliminating the hassle of users to directly control the camera, move and shoot for a long time, instead allows to automatically capture dozens or hundreds of shots of the desired portion of the image. It uses the dual display mode and allows the users to see the SE, BSE modes at a glance.
Standard BSE Detector
Chamber Scope
Panorama Shot
Panorama Shot in NanoStation 4.0 can combine hundreds or thousands of SEM images side by side into one consolidated image through stitching function.
This function enables the user to see large areas with high resolution image.
Signal Mixing
By merging SE and BSE images, each properties of both images can be observed at a glance.
| Resolution SE | 3.0nm at 30kV / 8.0nm at 3kV |
|---|---|
| Resolution BSE | 4.0nm at 30kV |
| Magnification | x15 to x300,000 |
| Digital Zoom | x2, x4 |
| Acceleration Voltages | 1 to 30kV |
| Variable Pressure Range | |
| Maximum Specimen Size | 160mm in Diameter |
| X,Y,Z,R,T | X : 0~60mm Y : 0~60mm Z : 5~60mm R : 360º T : -20~90º |
| Detector | SED / BSED |
| Control | Mouse / Keyboard |
| Auto Alignment | Auto Beam |
| Observation Area | 130mm in Diameter |
| Maximum Height | 55mm |
| Stage Control | Eccentric |
| Source | Tungsten |
