COXEM – Ion Coater SPT-20

Th​e ion co​ater, SPT-20, is a device used for coating conductive materials (Au, Pt, Pd, Pt-Pd) onto the sample surfaces by using DC sputtering princi​ple. Non-conductive samples are also used for observation under electron microscopes, and they are used to protect the sample surfaces from the injected electron beam and to help the electron flow. It can be used as an electrode formation of thin film type too.

1. Digital ion coater

2. Vacuum. coating. One touch coating system up to the normal pressure

3. Stable coating with coating Current Feedback function

4. Can be used with various​ metal targets 

5. Uses low-noise rotary pump

When a voltage is applied between the sample and the target in a set vacuum state inside the chamber, the remaining air molecules become plasma (ionized) and electrons and ions are formed. Moreover, the electrons and ions moving at a high speed collide with gas molecules, and ionization is accelerated by repelling electrons of the molecules, resulting ions colliding on the cathode part of the target, hit the target particles and the particles of the raw material collide and attach to form a coating layer.